| Summary: In this study, K and L X-ray production cross sections, fluorescence yields, intensity ratios were measured for the element and their compounds of Fe, Se, Zr, Sb, Ta, W and Superconducting FeySe1-xTex thin films were fabricated by using Radio Frequency (RF) sputtering.Their structural properties were anaysed by XRD, texture XRD, SEM, MPMS and XRF. 59.543 keV gamma photons emitted by an annular 50 mCi 241Am radioactive sources were used to excite the K and L shells of the sample, respectively. The K and L X-ray emitted from the samples were counted by an Ultra-LEGe detector with a resolution of 150 eV at 5.9 keV. The obtained values were compared with theoretically calculated values and the other theoretic, semi-empirical and empirical values in the literature. The differences between these values were explained according to chemical effect and multiply ionization effect.
Key Words: Fluorescence Cross-Section, Fluorescence Yield, Intensity Ratio, Vacancy Transfer Probability, Chemical Effect, Multiply Ionization Effect, RF sputtering, superconducting thin films.
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